Sample preparation of cross sections can be performed with an assortment of instruments and methods, and the process necessitates a different equipment setup, depending on the level of automation. For ...

Cross-section observation of a specimen using SEM can produce detailed information vital for research and development as well as for failure analysis. Generally, surface observation alone is incapable ...

Article Open access Published: 16 February 2016 Arbitrary cross-section SEM-cathodoluminescence imaging of growth sectors and local carrier concentrations within micro-sampled semiconductor ...