In 2019 and 2020, China imported 40 and 57 lithography machines from the Netherlands, respectively. The figure quickly rose to 93, 78, and 176 units in the following three years.

High Resolution: Block copolymer lithography enables the fabrication of nanostructures with feature sizes down to sub-10 nm, surpassing the resolution limits of traditional photolithography.; ...

Plasmas created by high power pulsed lasers are a good source for very short EUV wavelength radiation. This enables the EUV lithography era of today, which is likely to continue for the foreseeable ...

Digital lithography technology (DLT) is promising chipmakers to combine chips with submicron wiring on glass and other large substrates. And this maskless technology is at the center of a strategic ...