TOKYO, Oct. 1, 2025 /PRNewswire/ -- Nikon Corporation is reaffirming the availability of its Digital Lithography System, DSP-100, with orders having commenced in July 2025. This system is specifically ...
SANTA CLARA, Calif. – During the SPIE Microlithography conference here, IBM Corp. and Nikon Corp. announced demonstration of a “real” wafer exposure tool, based on electron-beam projection lithography ...
The DSP-100 integrates Nikon's high-resolution semiconductor lithography technology with the multi-lens technology* 4 from its flat panel display (FPD) lithography systems. It delivers high resolution ...
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