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Researchers develop novel dual-mode MEMS sensor for wide-range vacuum pressure detectionA research team led by Profs. Chen Deyong and Wang Junbo from the Aerospace Information Research Institute (AIR) of the ...
Capacitance Diaphragm Gauge (CDG) is a type of sensor commonly used under low vacuum with high accuracy and stability. Temperature is one of the most important factors affecting its measurement ...
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