This paper introduces a facile fabrication approach for creating a 3D free-standing structure of MEMS thermal flow sensors. Laser micromachining was used to pattern and separate the free-standing ...

He decided to replace this with a modern mass air flow (MAF) sensor instead, and documented the process online. The output of the sensors was compared with a rig built using a vacuum cleaner to ...

The temperature sensor can be instanced multiple times in a single chip. Tight thermal control of device activity is essential for performance optimization, power efficiency and long-term reliability.