Taiwan's Forward Science Corp. (Forwardtek), a leading vacuum pump supplier, has launched its new V-pro smart vacuum pump and ...

This paper describes the design, fabrication, and testing of a single-chip micromachined implementation of a Knudsen pump, which uses the principle of thermal transpiration, and has no moving parts. A ...

To obtain optimal system throughput for semiconductor device fabrications, fast vacuum pump-down operations are frequently performed to quickly depressurize processing chambers for desirable pressure ...