Taiwan's Forward Science Corp. (Forwardtek), a leading vacuum pump supplier, has launched its new V-pro smart vacuum pump and ...

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This paper describes the design, fabrication, and testing of a single-chip micromachined implementation of a Knudsen pump, which uses the principle of thermal transpiration, and has no moving parts. A ...

To obtain optimal system throughput for semiconductor device fabrications, fast vacuum pump-down operations are frequently performed to quickly depressurize processing chambers for desirable pressure ...

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The use of physicochemical preparation techniques of metal clusters in the ultrahigh vacuum (UHV) allows for high control of cluster nuclearity and size distribution for fundamental studies in ...