Automated in-situ TEM sample preparation on a FIB-SEM #AutoMicrosampling #AutoThinning #Lamella #TEMSample #FIB #FIBSEM #electronmicroscopy #ElectronMicroscope For details, please see the description at https://www.youtube.com/watch?v=YFNL9w_7Rjk&list=PL26wsKAGp_QZwiY8L-FToKM2HTPq4AG23&index=75 | Hitachi Electron Microscope
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Automated in-situ TEM sample preparation on a FIB-SEM #AutoMi…
52 viewsJul 6, 2022
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FIB processes for TEM sample prep from microsample extraction out of bulk sample to lamella thinning and eventually Ar ion beam finishing were automated using a FIB-SEM-Ar Triple Beam system. After Auto-Microsampling (in-situ lift out) and auto-thinning processes, Ar ion beam was automatically irradiated to reduce FIB-induced damage to realize unattended TEM lamella preparation. #Cu #CrystalOrientation #EBSD #GrainBoundary #FIB #SEM #FIBSEM #electronmicroscopy #ElectronMicroscope Available instr
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